Konu "aluminum nitride" için Elektrik - Elektronik Mühendisliği Bölümü Koleksiyonu listeleme
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AlN Piezoelectric Quad-Actuators for 2D Optical Micro Scanning
(TAYLOR & FRANCIS LTD, 2022)Piezoelectric actuation has been one of the frequent choices for optical micro scanning. In most of the cases, lead zirconate titanate (PZT) has been used as the piezoelectric material. However, PZT has a potential issue ... -
Quasi-Static Operation of 2-Axis-Tilt Microscanners with AlN Piezoelectric Quad-Actuators
(IEEE, 2021)Aluminum nitride (AlN) started to draw attentions as a material for piezoelectric actuation owing to its CMOS process compatibility and safeness for biomedical applications. Due to its relatively low piezoelectric ...